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Nanofabrication, MEMS and Nanotechnology
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This book of 270 pages is written on electrochemical micromachining (EMM) focusing applications in semiconductor industry and indicating future directions of EMM activities. Engineers, designers and researchers involved in micro-nano activities in the areas of mechanical and manufacturing engineering, and nanotechnology may find this book interesting. The Foreward is written by Prof. Dr. J. A. McGeough of the University of Edinburgh, United Kingdom.
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