A Digital Simulation of Adaptive Control MEMS Gyroscope

Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, military and control stabilization. As they are too large and they are very expensive to be used in many applications, Micro-machining technologies have made the design and fabrication of MEMS (Micro Electro Mechanical Systems) Gyroscopes. This paper presents an integrated simulation that incorporates the design of gyroscope and the signal conditioning unit to improve the performance of MEMS gyroscope. The gyroscope is simulated using the CAD tool. The signal conditioning unit includes Phase Locked Loop, PID controller and adaptive filtering. To minimize the quadrature error arise due to fabrication imperfection in MEMS gyroscope, an adaptive filtering technique is used. Phase Locked Loop (PLL) is used for the matching of the resonant frequency of the sensing mode with that of the driving mode.