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1. Nano-patterning of 16-MHA over palladium substrate using dip-pen nano-lithography (DPN)

Amit Kumar Goyal and Pankaj B Agarwal [Manufacturing Technology Today, V 13, N 3, Mar 2014, Starting page 13, 7 Pages] Rec. No: 109721

2. Study on nano thickness inspection for residual layer of nanoimprint lithography using nearfield optical enhancement of metal tip

Takahashi, S; Ikeda, Y; Takamasu, K [CIRP Annals, V 62, N 1, 2013, Starting page 527, 4 Pages] Rec. No: 109402


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  • Select Bibliography:Lithography / Etching

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1. Nano-patterning of 16-MHA over palladium substrate using dip-pen nano-lithography (DPN)

Amit Kumar Goyal and Pankaj B Agarwal [Manufacturing Technology Today, V 13, N 3, Mar 2014, Starting page 13, 7 Pages] Rec. No: 109721

2. Study on nano thickness inspection for residual layer of nanoimprint lithography using nearfield optical enhancement of metal tip

Takahashi, S; Ikeda, Y; Takamasu, K [CIRP Annals, V 62, N 1, 2013, Starting page 527, 4 Pages] Rec. No: 109402