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* Monolithically integrated MEMS mirror array with low electrical interference in  wavelengthselective switches.

* Thin-film piezoelectric materials for a better energy harvesting MEMS.

* Linear-stiffness rotary MEMS stage.


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  • Select Bibliography: MEMS

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Abstract


* Monolithically integrated MEMS mirror array with low electrical interference in  wavelengthselective switches.

* Thin-film piezoelectric materials for a better energy harvesting MEMS.

* Linear-stiffness rotary MEMS stage.