Measurement of Microstructure for Sensor Applications

Micro structures are the vital elements used in many types sensors coming in the micro and nano engineering regime. A typical pendulous accelerometer used for the measurements of acceleration consists of a pair of micro hinge with a thickness of 0.015mm which works as a low stiffness spring in the assembly. The hinge support a proof moss through a pendulum and when the assembly experience acceleration, the suspended moss change its position by deflecting the hinge to the direction depends upon the direction of input. Both hinge need to be coplanar and to be in uniform size to ensure a perfect highly sensitive sensor assembly with sufficient reliability. In this paper a measurement procedure is detailed with specific set up including the measuring device, fixtures etc. to confirm the functional requirements of the assembly and thereby the sensor performance.