Present Status of Micro Ultrasonic Machining

Micro Ultrasonic Machining is the downsized version of Ultrasonic Machining process in which material is removed from hard and brittle workpiece typically by micro-chipping. The tool vibrates at ultrasonic frequency (~20 kHz) with amplitude of 8-30 μm. Abrasive slurry containing abrasive particles flushes through the gap between the tool and workpiece. The tool is pushed on the workpiece with certain static load. The work material is directly hammered by numerous abrasive particles with kinetic energy imparted by the vibrated tool. Flushing of slurry refreshes the abrasive particles in the machining area and also removes the debris and worn abrasive particles away from the gap. During the last decades, a number of researchers have explored experimentally and theoretically this Micro USM technique with different materials. The paper reviews the research works performed in the area of Micro Ultrasonic Machining process such as machining set up, parametric analysis and applications.