Micro-Engineering-An Overview

Micro engineering is divided into two major areas. These are, Micro devices and Micro sensors, Micro devices include, electro statically driven motors. Micro-robots, Micro-pumps, Micro gears, etc. Micro sensors include. Mechanical sensors. Accelerometers, Pressure sensors, Transducers, etc. In any case, the overall dimension of any micro-system are in the order of few millimeters. This article gives a overview of this new technology-'Micro Engineering", covering the latest trends In micro-fabrication, microsensor technology and micro devices.