Manufacturing Technology Today

Gaurav Pendharkar ¹, Raghavendra Deshmukh ¹, Rajendra Patrikar ¹

Affiliations
1 Dept of Electronics Engineering, VNIT, Nagpur, IN

Abstract

In this paper we have studied different methods of fabrication of microchannels on silicon substrate for microfluidics application. The paper discusses two etching methods as Reactive Ion Etching (RIE) and Tetra Methyl Ammonium Hydroxide (TMAH). The current study investigates effects of RIE parameters on etching.

Keywords

Microfabrication, Reactive Ion Etching, Tetra Methyl Ammonium Hydroxide.

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