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Formation of Deep-Subwavelength Nanohole Arrays Embedded in Laser-Induced Nanoripples in Liquid Environments


Affiliations
1 Department of Software Engineering, Le Quy Don Technical University, No.236, Hoang Quoc Viet Street, Hanoi, 7EN-248, Viet Nam
 

Deep-subwavelength nanohole arrays embedded in nanoripples are observed in silicon carbide surface after irradiation of an 800-nm femtosecond laser in water and alcohol environment. The period of the nanoripples is about 500 nm. The diameter of the holes ranges from 10-30 nm. The effects of the liquid medium to the formation of the nanohole arrays are discussed. Under irradiation in alcohol, more nanohole arrays could be formed, and the nanoholes are more uniform in size. Moreover, we investigate the influence of the laser scanning speed on the nanohole arrays fabricated under irradiation in alcohol.

Keywords

Nanostructure Fabrication, Laser Materials Processing, Semiconductor Materials, Ultrafast Lasers.
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  • Gattass RR, Mazur E. Femtosecond laser micromachining in transparent materials. Nat photonics. 2008;2(4):219-225.

  • Lin J, Yingxin X, Zhiwei F, et al. Fabrication of high-Q lithium niobatemic roresonators using femtosecond laser micro machining. Sci Rep. 2015;58072.

  • Chen F, Aldana JR. Optical waveguides in crystalline dielectric materials produced by femtosecond‐laser micromachining Laser Photonics Rev. 2014:8:251-75.

  • Bachus KJ, Mats L, Choi HW, et al. Fabrication of patterned super-hydrophobic/hydrophilic substrates by laser micromachining for small volume deposition and droplet-based fluorescence ACS Appl Mater Inter. 2017;9(8):7629-7636.

  • Chen T, Si J, Hou X, et al. Applied physics specialties. J Appl Phys. 110, 073106-1-4, 2011.

  • Khuat V, Chen T, Gao B, et al. Uniform nano-ripples on the sidewall of silicon carbide micro-hole fabricated by femtosecond laser irradiation and acid etching. Appl Phys Lett. 2014;104(24):241907.

  • Qu S, Zhang Y, Li H, et al. Nanosecond nonlinear absorption in Au and Ag nanoparticles precipitated glasses induced by a femtosecond laser. Opt Mater.2006;28(3):259-65.

  • Bhardwaj VR, Simova E, Rajeev PP, et al. Optically produced arrays of planar nanostructures inside fused silica. Phys Rev Let. 2006;96(5):057404.

  • Shimotsuma Y, Kazansky PG, Qiu J, et al. Self-organized nanogratings in glass irradiated by ultrashort light pulses. Phys Rev Let. 2003;91(24):247405.

  • Zheng Y, An, Z, Smyrek P, et al. Laser interference patterning and laser-induced periodic surface structure formation on metallic substrates. In Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO). IEEE International Conference. 2016:159-163.

  • Wagner R, Gottmann J. Sub-wavelength ripple formation on various materials induced by tightly focused femtosecond laser radiation. In Journal of Physics: Conference Series. IOP Publishing. 2007;59(1):333).

  • Hou S, Huo Y, Xiong P, et al. Formation of long-and short-periodic nanoripples on stainless steel irradiated by femtosecond laser pulses. D Appl Phys. 2011;44(50):505401.

  • Young JF, Preston JS, Van Driel HM, et al. Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass. Phys Rev B. 1983;27(2):1155.

  • Huang M, Zhao F, Cheng Y, et al. Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond. Phys Rev B. 2009;79(12):125436.

  • Huang M, Zhao F, Cheng Y, et al. Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser. Acs Nano. 2009;3(12):4062-70.

  • Buividas R, Rosa L, Sliupas R, et al. Mechanism of fine ripple formation on surfaces of (semi) transparent materials via a half-wavelength cavity feedback. Nanotechnology. 2011;22(5):055304.

  • Daminelli G, Kruger J, Kautek W. Femtosecond laser interaction with silicon under water confinement. Thin Solid Films. 2004;467(1):334-341.

  • Kruusing A. Underwater and water-assisted laser processing: Part 2—Etching, cutting and rarely used methods. Opt. Laser. Eng. 2004;41(2):329-52.

  • Li C, Shi X, Si J. et al. Alcohol-assisted photoetching of silicon carbide with a femtosecond laser. Opt Commun. 2009;282(1):78-80.

  • Wee LM, Khoong LE, Tan CW, et al. Development of a water-jet assisted underwater laser cutting process. Int J Appl Ceram Tec. 8(6), 1263-1276(2011).

  • Tan D, Zhou S, Qiu J, et al. Preparation of functional nanomaterials with femtosecond laser ablation in solution. Photoch Photobio C. 2013;17:50-68.

  • Khuat V, Si J, Chen T, et al. Deep-subwavelength nanohole arrays embedded in nanoripples fabricated by femtosecond laser irradiation. Opt Lett. 2015;40(2):209-212.

  • Bozhevolnyi SI, Volkov VS, Devaux E, et al. Channel plasmon-polariton guiding by subwavelength metal grooves. Phys Rev Let. 2005;95(4):046802.

  • Bozhevolnyi SI, Volkov VS, Devaux E, et al. Channel plasmon subwavelength waveguide components including interferometers and ring resonators. Nature. 2006;440(7083):508-11.

  • Pile DF, Gramotnev DK, Channel plasmon–polariton in a triangular groove on a metal surface. Optics Letters. Opt Lett. 2004;29(10):1069-71.

  • Makin VS, Logacheva EI, Makin RS. Localized surface plasmon polaritons and nonlinear overcoming of the diffraction optical limit. Opt Spectrosc. 2016;120(4):610-4.

  • Makin VS, Pestov YI, Makin RS. Surface nanogratings of abnormal orientation in universal polariton model of laser-induced damage of condensed media. In Journal of Physics: Conference Series. IOP Publishing. 2016;737(1):012014.

  • Wang L, Cao XW, Chao LV, et al. Formation of deep-subwavelength structures on organic materials by femtosecond laser ablation. IEEE Journal of Quantum Electronics. 2017:99.


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  • Formation of Deep-Subwavelength Nanohole Arrays Embedded in Laser-Induced Nanoripples in Liquid Environments

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Authors

Vanthanh Khuat
Department of Software Engineering, Le Quy Don Technical University, No.236, Hoang Quoc Viet Street, Hanoi, 7EN-248, Viet Nam

Abstract


Deep-subwavelength nanohole arrays embedded in nanoripples are observed in silicon carbide surface after irradiation of an 800-nm femtosecond laser in water and alcohol environment. The period of the nanoripples is about 500 nm. The diameter of the holes ranges from 10-30 nm. The effects of the liquid medium to the formation of the nanohole arrays are discussed. Under irradiation in alcohol, more nanohole arrays could be formed, and the nanoholes are more uniform in size. Moreover, we investigate the influence of the laser scanning speed on the nanohole arrays fabricated under irradiation in alcohol.

Keywords


Nanostructure Fabrication, Laser Materials Processing, Semiconductor Materials, Ultrafast Lasers.

References