Experimental Investigation of Process & Response Parameters in Micro Drilling Using Scanning Electron Microscope (SEM)

Micro drilled holes are utilized in many of today's fabrication processes. Precision production processes in industries are trending toward the use of smaller holes with higher aspect ratios, and higher speed operation for micro deep hole drilling. However, undesirable characteristics related to micro drilling such as small signal-to-noise ratios, wandering drill motion and excessive cutting forces can be observed when cutting depth increases. In the experimental study, the application of the DOE (Design of Experiment) method and Scanning Electron Microscope (SEM) is utilized. In particular, it is found in this study that the feed rate is the most important factor for micro drilling process.