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Photonic Crystal-Based force Sensor to Measure Sub-Micro Newton forces over a Wide Range


Affiliations
1 Department of Electrical Communication Engineering, Indian Institute of Science, Bengaluru 560 012, India
2 Centre for Nano Science and Engineering, Indian Institute of Science, Bengaluru 560 012, India
 

A photonic crystal-based force sensor to measure forces in the wide range 100 nN-10 μN is proposed here. An optimized photonic crystal resonator integrated on top of a Si/SiO2 bilayer cantilever, is used as the sensing device. A sensitivity of 0.1 nm for a force of 100 nN is obtained with a high-quality factor of 10,000. The sensor characteristics in the force ranges 0-1 μN and 0-10 μN are also presented here. Linear wavelength shift and constant quality factor are observed in the entire studied force range.

Keywords

Cantilever Beam, Force Sensing, Optical Sensors, Photonic Crystal Resonator.
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  • Photonic Crystal-Based force Sensor to Measure Sub-Micro Newton forces over a Wide Range

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Authors

T. Sreenivasulu
Department of Electrical Communication Engineering, Indian Institute of Science, Bengaluru 560 012, India
Venkateswara Rao Kolli
Department of Electrical Communication Engineering, Indian Institute of Science, Bengaluru 560 012, India
T. R. Yadunath
Department of Electrical Communication Engineering, Indian Institute of Science, Bengaluru 560 012, India
T. Badrinarayana
Department of Electrical Communication Engineering, Indian Institute of Science, Bengaluru 560 012, India
Amaresh Sahu
Department of Electrical Communication Engineering, Indian Institute of Science, Bengaluru 560 012, India
Gopalkrishna Hegde
Centre for Nano Science and Engineering, Indian Institute of Science, Bengaluru 560 012, India
S. Mohan
Centre for Nano Science and Engineering, Indian Institute of Science, Bengaluru 560 012, India
T. Srinivas
Department of Electrical Communication Engineering, Indian Institute of Science, Bengaluru 560 012, India

Abstract


A photonic crystal-based force sensor to measure forces in the wide range 100 nN-10 μN is proposed here. An optimized photonic crystal resonator integrated on top of a Si/SiO2 bilayer cantilever, is used as the sensing device. A sensitivity of 0.1 nm for a force of 100 nN is obtained with a high-quality factor of 10,000. The sensor characteristics in the force ranges 0-1 μN and 0-10 μN are also presented here. Linear wavelength shift and constant quality factor are observed in the entire studied force range.

Keywords


Cantilever Beam, Force Sensing, Optical Sensors, Photonic Crystal Resonator.



DOI: https://doi.org/10.18520/cs%2Fv110%2Fi10%2F1989-1994