Analysis of Complementary Beam Structured RF MEMS Switch for Wireless Applications

This paper analysis the performance of a RF MEMS switch having a complementary beam structure operating at frequency ranging from 0 to 12GHz, which facilitates its application in the field of wireless mobile communication. This design is a modified cantilever beam forming a complementary structure with an easy fabrication process to implement. The switch is designed in form of a meander beam spring type in order to lower the spring constant there by achieving a relatively less pull-in voltage for actuation. The simulated results show a pull-in voltage of about 4V with the complementary cantilever beam structure. RF analysis shows a negligible insertion loss of -0.113dB and -7.181dB in the up-state of the switch from 0 to 12GHz. The isolation in the up-state was -57.62dB at 12GHz.