ICTACT Journal on Microelectronics

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Overview of MEMS Sensors and Associated Aspects


Affiliations
1 Systems Engineering Group, ISRO Satellite Centre, Bangalore, India
     

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MEMS technology is pervading in all domains ranging from commercial to strategic sectors so it is imperative that application oriented development encompassing fabrication, characterization, assembly and packaging aspects to be looked into to get the reliable product. This article details the overview of MEMS sensors and various aspects such as thin film process, process characterization tools, assembly along with challenges in realization are presented. Reduction in measurement inaccuracy is extremely important and main parameters associated with the sensors are explained.

Keywords

MEMS, Sensors, Fabrication Process, Assembly.
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  • G.K. Ananthasuresh, K.J. Vinoy, S. Gopalakrishnan, K.N.Bhat and V.K. Aatre,“Micro and Smart Systems”, Wiley India, 2010.

  • Sunipa Roy and Chandan Kumar Sarkar, “MEMS and Nanotechnology for Gas Sensors”, 1st Edition, CRC Press 2016.

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  • Amit Saxena, Satya N Behera, Kamaljeet Singh and Paritosh Jain, “Process Optimization and Role of Process Parameters for Repeatable Metal Etching”, Proceedings of National Conference on Micro and Nano Fabrication, pp. 1-4, 2013.

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  • Kamaljeet Singh and A.V. Nirmal, “Development and Characterization of RF-MEMS Shunt Switch at Ka-Band”, Proceedings of 8th International Conference on Smart Materials, Structures and Systems, pp. 31-32, 2017.

  • N. Yazdi, F Ayazi and K Najafi, “Micromachined Inertial Sensors”, Proceedings of IEEE, Vol. 86, No. 8, pp. 1640-1657, 1998.

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  • Overview of MEMS Sensors and Associated Aspects

Abstract Views: 272  |  PDF Views: 6

Authors

Kamaljeet Singh
Systems Engineering Group, ISRO Satellite Centre, Bangalore, India

Abstract


MEMS technology is pervading in all domains ranging from commercial to strategic sectors so it is imperative that application oriented development encompassing fabrication, characterization, assembly and packaging aspects to be looked into to get the reliable product. This article details the overview of MEMS sensors and various aspects such as thin film process, process characterization tools, assembly along with challenges in realization are presented. Reduction in measurement inaccuracy is extremely important and main parameters associated with the sensors are explained.

Keywords


MEMS, Sensors, Fabrication Process, Assembly.

References