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Topic for This Month:Micro Machining and Micro Fabrication


     

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* Multiple-wavelength laser micromachining of semiconductor devices.

* Diaphragm ultraviolet laser micromachining system used for scanning electron microscope and method thereof.

* Diaphragm ultraviolet laser micromachining system used for scanning electron microscope and method thereof.

* Adjustable solubility in sacrificial layers for microfabrication.


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  • Topic for This Month:Micro Machining and Micro Fabrication

Abstract Views: 175  |  PDF Views: 0

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Abstract


* Multiple-wavelength laser micromachining of semiconductor devices.

* Diaphragm ultraviolet laser micromachining system used for scanning electron microscope and method thereof.

* Diaphragm ultraviolet laser micromachining system used for scanning electron microscope and method thereof.

* Adjustable solubility in sacrificial layers for microfabrication.