Manufacturing Technology Today

Open Access Open Access  Restricted Access Subscription Access
Open Access Open Access Open Access  Restricted Access Restricted Access Subscription Access

Micro Electro Mechanical Systems (MEMS)


     

   Subscribe/Renew Journal


* MEMS Fluid Sensor.

* MEMS Device with Mutually Perpendicular Deflectable Reflective and Electrode Surfaces.

* Non-Contacting Electrostatically-Driven MEMS Device.

* Bi-Axially Driven MEMS Device.

* System and Method of Driving a MEMS Display Device.

* Semiconductor Package Substrate, in Particular for MEMS Devices.


User
Subscription Login to verify subscription
Notifications
Font Size

Abstract Views: 202

PDF Views: 0




  • Micro Electro Mechanical Systems (MEMS)

Abstract Views: 202  |  PDF Views: 0

Authors

Abstract


* MEMS Fluid Sensor.

* MEMS Device with Mutually Perpendicular Deflectable Reflective and Electrode Surfaces.

* Non-Contacting Electrostatically-Driven MEMS Device.

* Bi-Axially Driven MEMS Device.

* System and Method of Driving a MEMS Display Device.

* Semiconductor Package Substrate, in Particular for MEMS Devices.