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Micro Electro Mechanical Systems (MEMS)


     

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* MEMS Fluid Sensor.

* MEMS Device with Mutually Perpendicular Deflectable Reflective and Electrode Surfaces.

* Non-Contacting Electrostatically-Driven MEMS Device.

* Bi-Axially Driven MEMS Device.

* System and Method of Driving a MEMS Display Device.

* Semiconductor Package Substrate, in Particular for MEMS Devices.


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  • Micro Electro Mechanical Systems (MEMS)

Abstract Views: 210  |  PDF Views: 0

Authors

Abstract


* MEMS Fluid Sensor.

* MEMS Device with Mutually Perpendicular Deflectable Reflective and Electrode Surfaces.

* Non-Contacting Electrostatically-Driven MEMS Device.

* Bi-Axially Driven MEMS Device.

* System and Method of Driving a MEMS Display Device.

* Semiconductor Package Substrate, in Particular for MEMS Devices.