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Micro Electro Mechanical Systems (MEMS)
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* MEMS Fluid Sensor.
* MEMS Device with Mutually Perpendicular Deflectable Reflective and Electrode Surfaces.
* Non-Contacting Electrostatically-Driven MEMS Device.
* Bi-Axially Driven MEMS Device.
* System and Method of Driving a MEMS Display Device.
* Semiconductor Package Substrate, in Particular for MEMS Devices.
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