Theoretical and Experimental Study on Performance of Pneumatic Vibration Isolators for use in Ultraprecision Machine Tools

Pneumatic Vibration isolators are used as vibration control devices in ultra precision machines / optical & instrumentation tables to cut off ground vibration efficiently. This helps in achieving surface roughness of a few nanometers on finished jobs on a ultraprecision machine. Unlike optical& instrumentation tables, in ultraprecision machines payload is high, with high moving loads. The static loads at various isolators of the isolation system also vary widely. During machining of jobs, the centre of gravity of machine will be shifting resulting in further change in load distribution of the isolator system. Experimental studies on the performance of different reputed make pneumatic vibration isolators on a ultraprecision machine has been carried out at CMTI to study various performance characteristics and to establish guidelines for selection and usage of pneumatic isolators in ultraprecision machines.