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Effect of Excimer Laser Parameters on the Ablation Depth During Micromachining of Polycarbonate


Affiliations
1 Karunya Institute of Technology, Coimbatore, India
2 Scientist-C, Central Manufacturing Technology Institute( CMTI), Bengaluru, India
     

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Polycarbonate (PC) material widely used in micro pumps & micro valves. In machining of PC using Excimer laser ablation rate is one of the important factors in achieving desired features. In the present work, micromachining of Polycarbonate (PC) was carried out using KrF excimer laser of 248 nm wavelength. A micro- hole of Ø150μm was machined on PC substrate during the experimentation. The PC substrates were exposed to a different number of pulses (1-100) at repetition rates of 2-10 Hz respectively by keeping the pulse energy unchanged at 100mJ. The effect of pulse repetition rate and a number of pulses on ablation depth has been investigated in the current work.

Keywords

Micromachining, Excimer Laser, Polycarbonate, Ablation Depth, Pulse Repetition Rate, Number of Pulses.
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  • Heng Qi, TaoChen, LiyingYao, TiechuanZuo (2008). Micromachining of micro channel on the polycarbonate substrate with co2 laser direct writing ablation.

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  • Toshio Mimura, Kouji Kakizaki, Hiroaki Oizumi, Masakazu Kobayashi (2017). High power DUV lasers for material processing 323-8558

  • Junichi Fujimotoa, Masakazu Kobayashia, Koji Kakizakia, Hiroaki Oizumia (2017). 248nm high power laser for the micro and macro material processing


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  • Effect of Excimer Laser Parameters on the Ablation Depth During Micromachining of Polycarbonate

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Authors

E. Pradeep Kumar Reddy
Karunya Institute of Technology, Coimbatore, India
Sunil Magadum
Scientist-C, Central Manufacturing Technology Institute( CMTI), Bengaluru, India

Abstract


Polycarbonate (PC) material widely used in micro pumps & micro valves. In machining of PC using Excimer laser ablation rate is one of the important factors in achieving desired features. In the present work, micromachining of Polycarbonate (PC) was carried out using KrF excimer laser of 248 nm wavelength. A micro- hole of Ø150μm was machined on PC substrate during the experimentation. The PC substrates were exposed to a different number of pulses (1-100) at repetition rates of 2-10 Hz respectively by keeping the pulse energy unchanged at 100mJ. The effect of pulse repetition rate and a number of pulses on ablation depth has been investigated in the current work.

Keywords


Micromachining, Excimer Laser, Polycarbonate, Ablation Depth, Pulse Repetition Rate, Number of Pulses.

References