





Deflection in Micro-Scale Thermoelastic Simply-Supported Beams Due to Patch Loading
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In this paper, an analytical model is developed and investigated for the transverse deflection in a transversely isotropic, thermoelastic simply-supported beam resonator subjected to time harmonic patch loading. Closed form expressions based on Euler–Bernoulli beam theory are derived for the flexural vibrations in a transversely isotropic, thermoelastic micro-beam. A time harmonic patch load is assumed to act within the region of the beam. The Laplace transform technique has been used to find the transverse deflection in the transform domain due to patch loading on the beam. The deflection so obtained in a physical domain has been computed numerically with the help of MATLAB software and presented graphically for silicon material beams.
Keywords
Anisotropy, MEMS, Beam Resonators, Euler-Bernoulli Equation, Laplace Transforms.
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