International Journal of Advanced Studies in Computer Science and Engineering

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In this paper, we improve the TOE (Thermo-optic Efficiency) of SiN using SiOC as upper clad layer to simulate the waveguide and analyzed the refractive index by using MEEP/Beam-prop software for superior experimental results. In order to create photonic integrated circuits, a number of material platforms have been researched. (PICs). The semiconductors (Si, InP, GaAS) are not fulfil the complete requirement of photonics. So, we use dielectrics SiON, SiO2, SiN, and SiOC at 1550 nm become well-established platforms lowest losses possible, they suffer from relatively lower coefficient of themo-optic, about 10-5 / C. Silicon Nitride (SiN) has low TOC 2×10-5 / K and the recently silicon oxycarbide (SiOC) has been shown to highest TOC among the dielectrics 4 × 10-4 / K.

Keywords

Integrated Photonics, Thermo-Optic Effect, Silicon Nitride, Silicon Oxycarbide, Optical Waveguides.
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