Design and Analysis of an Integrated Mems Harvester for Low Power Devices

V. Khanaa; K. P. Thooyamani

doi:10.17485/ijst/2015/v8i32/123002

Design and Analysis of an Integrated Mems Harvester for Low Power Devices

Affiliations
1 Information, Bharath University, Chennai–600073, Tamil Nadu, India
2 School of Computing, Bharath University, Chennai–600073, Tamil Nadu, India

Abstract
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This paper introduces a hybrid energy harvester generating electric power from both ambient heat and vibration. Harvesting energy from vibration was realized by piezoelectric effect Phenomena in Lead Zirconate Titanate (PZT) crystals, whereas the energy generation from heat was supplied by making use of Seebeck effect of n-type and p-type Bi2Te3 thermocouples. The industrial software Comsol Multi physics is used for the simulation. A total voltage of 17.024V was generated from the thermoelectric part and .4 V from the piezoelectric part of the device. Total power produced from the chip is predicted to be 1.91nW.