Mechanical and Structural Characterization of DLC Prepared by PECVD Technique

Diamondlike carbon (DLC) films have been explored extensively in the past due to their highly attractive properties. However, the high level of internal stress developed during growth, calls for stress relieving process where structural and mechanical properties changes takes place. In the present study, the DLC is deposited on Si substrate using PECVD process and mechanical & structural changes during the post heat treatment process of DLC are investigated by using nanoindentation and Raman spectroscopy. Increase in hardness value confirmed the conversion of sp² to sp³ structure while heat treatment.