Simulation Study for Reduction in Natural Frequency and Stiffness of Meander Structure with Constant Device Dimension

Most of the MEMS structures use proof mass to reduce the frequency but increases the device dimension. This paper deals with the variation of natural frequency and stiffness of the structure when changed from rectangular to multi-turn meander structure. The suspended meander structures are designed with silicon nitride and simulation were carried using COMSOL Multiphysics FEM model to investigate the natural frequency and deflection of the structure by varying the number of turns ‘N’. The simulation and Analytical results show an impact with variation of N on the natural frequency of the structure when the distance between the fixed-fixed beam is kept constant. Further investigation is carried out on the stiffness variation of multi-turn meander structure with fixed at one end.