Open Access Open Access  Restricted Access Subscription Access

MEMS:A Smart System of Modern Era


Affiliations
1 Electronics & Communication Engineering, India
 

MEMS or Micro Electro Mechanical Systems are the microscopic structures integrated onto silicon that combine mechanical, optical and fluidic elements with electronics. Though a MEMS device is of the size of a sand grain, these devices are complex machines that enable chips to become intelligent. They act as the most direct links between digital electronics and the physical world, allowing the integration of electronics and mechanical systems on a single chipset.
User
Notifications
Font Size


Abstract Views: 198

PDF Views: 104




  • MEMS:A Smart System of Modern Era

Abstract Views: 198  |  PDF Views: 104

Authors

Sukla Basu
Electronics & Communication Engineering, India

Abstract


MEMS or Micro Electro Mechanical Systems are the microscopic structures integrated onto silicon that combine mechanical, optical and fluidic elements with electronics. Though a MEMS device is of the size of a sand grain, these devices are complex machines that enable chips to become intelligent. They act as the most direct links between digital electronics and the physical world, allowing the integration of electronics and mechanical systems on a single chipset.