Reason-A Technical Journal (Formerly Reason-A Technical Magazine)

The PDF file you selected should load here if your Web browser has a PDF reader plug-in installed (for example, a recent version of Adobe Acrobat Reader).

If you would like more information about how to print, save, and work with PDFs, Highwire Press provides a helpful Frequently Asked Questions about PDFs.

Alternatively, you can download the PDF file directly to your computer, from where it can be opened using a PDF reader. To download the PDF, click the Download link above.

Fullscreen Fullscreen Off


MEMS or Micro Electro Mechanical Systems are the microscopic structures integrated onto silicon that combine mechanical, optical and fluidic elements with electronics. Though a MEMS device is of the size of a sand grain, these devices are complex machines that enable chips to become intelligent. They act as the most direct links between digital electronics and the physical world, allowing the integration of electronics and mechanical systems on a single chipset.
User
Notifications
Font Size